MOLD BLANK, MASTER MOLD, METHOD OF MANUFACTURING COPY MOLD AND MOLD BLANK
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United States of America Patent
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Aug 21, 2014
app pub date -
Sep 12, 2012
filing date -
Sep 30, 2011
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Abstract
There is provided a mold blank comprising a hard mask, wherein the hard mask layer has a composition containing chromium, nitrogen, and oxygen and has a content variation structure in which content of the nitrogen is varied continuously or gradually in a layer thickness direction and content of the oxygen is varied in the layer thickness direction continuously or gradually substantially in an opposite direction to the nitrogen.
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