Thermal spray powder and film that contain rare-earth element, and member provided with film

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United States of America Patent

PATENT NO 9528176
APP PUB NO 20140234634A1
SERIAL NO

14346583

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Abstract

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A thermal spray powder of the present invention contains a rare earth element and a diluent element that is not a rare earth element or oxygen, which is at least one element selected, for example, from zinc, silicon, boron, phosphorus, titanium, calcium, strontium, and magnesium. A sintered body of a single oxide of the diluent element has an erosion rate under specific etching conditions that is no less than 5 times the erosion rate of an yttrium oxide sintered body under the same etching conditions.

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Patent Owner(s)

  • FUJIMI INCORPORATED;TOKYO ELECTRON LIMITED

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kitamura, Junya Kiyosu, JP 21 105
Kobayashi, Yoshiyuki Miyagi-ken, JP 433 4419
Mizuno, Hiroaki Kiyosu, JP 48 252

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