Mass spectrometer

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United States of America Patent

PATENT NO 8957392
APP PUB NO 20140239173A1
SERIAL NO

14349892

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Abstract

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In order to solve a problem in a mass spectrometry that a distribution of an emitted ion and a substance distribution on the measurement object surface are different from each other, which is due to a shaded portion of a irregular surface which falls under a shadow of primary beam, a primary ion optical system of the present apparatus includes a deflection unit configured to deflect the primary ion in such a manner that the primary ion intersects a flight space of the secondary ion in the course of flight.

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Patent Owner(s)

  • CANON KABUSHIKI KAISHA

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Iwasaki, Kota Atsugi, JP 34 56

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