Liquid discharge head substrate, liquid discharge head, and method of manufacturing liquid discharge head substrate
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United States of America Patent
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Jun 2, 2015
Grant Date -
Aug 28, 2014
app pub date -
Feb 20, 2014
filing date -
Feb 22, 2013
priority date (Note) -
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Abstract
A liquid discharge head substrate includes a base; a pair of wiring lines; a heat-generating resistive layer, which is in contact with the wiring lines, and which has a portion corresponding to a space between the wiring lines, the portion forming an electrothermal transducer; an insulating layer which covers the heat-generating resistive layer and the wiring lines and which contains Si; a protective layer which covers at least one region of the insulating layer which contains Ir; and an intermediate layer which is placed between the insulating layer and the protective layer. The intermediate layer contains a material represented by the formula TaxSiyNz, where x is 5 atomic percent to 80 atomic percent, y is 3 atomic percent to 60 atomic percent, z is 10 atomic percent to 60 atomic percent.
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