Measurement device

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United States of America Patent

PATENT NO 9134175
APP PUB NO 20140240711A1
SERIAL NO

14187437

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A spectrometry device includes a wavelength-tunable interference filter that is provided with a stationary reflection film, a movable reflection film and an electrostatic actuator which changes a gap dimension between the stationary reflection film and the movable reflection film; a detector that receives incident light; a filter control unit that sets the gap dimension between the stationary reflection film and the movable reflection film to be a first dimension corresponding to light having a first wavelength which is smaller than that of a measurement target wavelength region; a cutoff filter that cuts off the light having a wavelength which is smaller than that of the measurement target wavelength region; and a light quantity acquisition unit that acquires the light quantity of stray light received by the detector when the gap dimension is changed to be the first dimension.

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Patent Owner(s)

  • SEIKO EPSON CORPORATION

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Matsushita, Tomonori Chino, JP 32 142

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