Photonic device structure and method of manufacture

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United States of America Patent

PATENT NO 9005458
APP PUB NO 20140241682A1
SERIAL NO

13776836

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Abstract

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Disclosed method and apparatus embodiments provide a photonic device with optical isolation from a supporting substrate. A generally rectangular cavity in cross section is provided below an element of the photonic device and the element may be formed from a ledge of the supporting substrate which is over the cavity.

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Patent Owner(s)

  • MICRON TECHNOLOGY, INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Meade, Roy Boise, US 55 288
Sandhu, Gurtej Boise, US 243 7795

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