Volatile Imidazoles and Group 2 Imidazole Based Metal Precursors

United States of America Patent

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Issued Date
Aug 28, 2014
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Feb 27, 2014
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Feb 5, 2010

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Abstract

Sterically hindered imidazolate ligands are described, along with their synthesis, which are capable of coordinating to Group 2 metals, such as: calcium, magnesium, strontium, in an eta-5 coordination mode which permits the formation of monomeric or dimeric volatile complexes.

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VERSUM MATERIALS US LLC	8555 S RIVER PARKWAY TEMPE AS 85284

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H01L:SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICE....

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Inventor Name	Address	# of filed Patents	Total Citations
Kim, Moo-Sung	Sungnam, KR	75	1959
Norman, John Anthony Thomas	Encinitas, US	45	2843
Perez, Melanie K	San Diego, US	7	45

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Volatile Imidazoles and Group 2 Imidazole Based Metal Precursors

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United States of America Patent

14191730

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