Polishing slurry for cobalt removal

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United States of America Patent

PATENT NO 9576818
APP PUB NO 20140243250A1
SERIAL NO

14192630

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Abstract

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Provided herein are polishing compositions for removal of Co, for example, selectively over Cu, and methods of their use. A polishing composition comprising an abrasive and one or more Co complexors, where the polishing composition has a pH of 9 or more, and the Co complexor comprises one or more of functional groups selected from phosphonic acid (—P(═O)(OH)2) group or carboxyl (—C(═O)OH) group.

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Patent Owner(s)

  • FUJIMI INCORPORATED

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Granstrom, Jimmy Tualatin, US 7 35
Miller, Anne Tualatin, US 14 432

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