Encapsulated phase change cell structures and methods
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United States of America Patent
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Jun 23, 2015
Grant Date -
Sep 4, 2014
app pub date -
Feb 19, 2014
filing date -
Jun 23, 2009
priority date (Note) -
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Abstract
Methods and devices associated with phase change cell structures are described herein. In one or more embodiments, a method of forming a phase change cell structure includes forming a substrate protrusion that includes a bottom electrode, forming a phase change material on the substrate protrusion, forming a conductive material on the phase change material, and removing a portion of the conductive material and a portion of the phase change material to form an encapsulated stack structure.
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