Segmented guard ring structures with electrically insulated gap structures and design structures thereof
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United States of America Patent
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Mar 24, 2015
Grant Date -
Sep 4, 2014
app pub date -
Mar 1, 2013
filing date -
Mar 1, 2013
priority date (Note) -
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Abstract
Disclosed are guard ring structures with an electrically insulated gap in a substrate to reduce or eliminate device coupling of integrated circuit chips, methods of manufacture and design structures. The method includes forming a guard ring structure comprising a plurality of metal layers within dielectric layers. The method further includes forming diffusion regions to electrically insulate a gap in a substrate formed by segmented portions of the guard ring structure.
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