RADIATION SOURCE DEVICE, LITHOGRAPHIC APPARATUS, AND DEVICE MANUFACTURING METHOD
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United States of America Patent
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Issued Date -
Sep 4, 2014
app pub date -
Oct 23, 2012
filing date -
Nov 15, 2011
priority date (Note) -
Abandoned
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Abstract
In a discharge-produced plasma source, a pair of electrodes is charged using a transmission line. In an embodiment, a pair of transmission lines may be used, connected symmetrically to the electrodes. The impedance of the transmission lines, or the total impedance of the transmission lines, is equal to that of the discharge in an embodiment. Use of a transmission line provides longer discharge pulses with more consistent potential difference.
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