DIFFRACTION OPTICAL ELEMENT, OPTICAL SYSTEM, AND OPTICAL APPARATUS
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United States of America Patent
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Issued Date -
Sep 4, 2014
app pub date -
Mar 3, 2014
filing date -
Mar 4, 2013
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Abandoned
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Abstract
A diffraction optical element including: a diffractive grating provided with a grating surface and a grating wall surface; and a thin film arranged on the grating wall surface and being transparent with respect to light of a used wavelength range, wherein
- the following expressions;
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