Specimen inspection apparatus
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United States of America Patent
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Aug 4, 2015
Grant Date -
Sep 11, 2014
app pub date -
Mar 7, 2014
filing date -
Mar 8, 2013
priority date (Note) -
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status (Latency Note)
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Abstract
A specimen inspection apparatus includes: a terahertz wave generation unit which generates a terahertz wave; a transportation unit which includes a transportation surface on which specimens as inspection objects are loaded and is configured so as to transport the specimens in an in-plane direction of the transportation surface; an irradiation direction changing unit which changes an irradiation direction of a terahertz wave which is emitted from the terahertz wave generation unit and is emitted to the specimens loaded on the transportation surface; and a terahertz wave detection unit which detects a terahertz wave which is emitted to the specimens loaded on the transportation surface to transmit therethrough or be reflected thereby, wherein the irradiation direction changing unit changes the irradiation direction by changing a position of the terahertz wave generation unit.
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