PLASMA GENERATOR
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United States of America Patent
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app pub date -
Sep 28, 2012
filing date -
Sep 28, 2011
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Abstract
An arrangement for generating plasma, the arrangement comprising a primary plasma source (1) arranged for generating plasma, a hollow guiding body (11) arranged for guiding at least a portion of the plasma generated by the primary plasma source to a secondary plasma source (25), and an outlet (14) for emitting at least a portion of the atomic radicals produced by the plasma from the arrangement.
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