Resonator element, resonator, oscillator, electronic apparatus, and moving object
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United States of America Patent
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Jun 30, 2015
Grant Date -
Sep 11, 2014
app pub date -
Feb 27, 2014
filing date -
Mar 5, 2013
priority date (Note) -
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Abstract
A resonator element includes a piezoelectric substrate that includes a vibration portion, and a thick portion which is integrally formed with an outer edge excluding a partial outer edge in an outer edge of the vibration portion and which is thicker than the vibration portion, and a pair of excitation electrodes that are respectively provided on a first main surface and a second main surface of a vibration region which are in front and rear relationships. In addition, the piezoelectric substrate includes first and second beam portions that are provided along a fourth side of the vibration portion.
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