Microelectromechanical device having an oscillating mass and a forcing stage, and method of controlling a microelectromechanical device
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United States of America Patent
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Sep 20, 2016
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app pub date -
Mar 13, 2013
filing date -
Mar 13, 2013
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Abstract
A microelectromechanical device includes: a body; a movable mass, elastically coupled to the body and oscillatable with respect to the body according to a degree of freedom; a frequency detector, configured to detect a current oscillation frequency of the movable mass; and a forcing stage, capacitively coupled to the movable mass and configured to provide energy to the movable mass through forcing signals having a forcing frequency equal to the current oscillation frequency detected by the frequency detector, at least in a first transient operating condition.
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