SUBSTRATE HOLDER APPARATUS AND VACUUM PROCESSING APPARATUS
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United States of America Patent
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N/A
app pub date -
Jun 2, 2014
filing date -
Dec 15, 2011
priority date (Note) -
Abandoned
status (Latency Note)
Importance
Abstract
A substrate holder apparatus includes a substrate holder configured to hold a substrate in a vacuum processing space in a chamber, a support column coupled to the substrate holder, a first rotating support unit which rotatably supports the support column, a second rotating support unit which rotatably supports the support column at a position spaced apart from a position where the first rotating support unit supports the support column, a housing configured to support the first rotating support unit and the rotating support unit, and a conductive member configured to electrically connect the support column to the housing.
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