SEPARATION OF FUNCTION-BASED THIN-FILM DEPOSITION SYSTEMS AND METHOD FOR SYNTHESIS OF COMPLEX MATERIALS
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United States of America Patent
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Issued Date -
Sep 18, 2014
app pub date -
Mar 15, 2013
filing date -
Mar 15, 2013
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Abandoned
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Abstract
A thin-film deposition system and method based on separating the function of multiple material sources by locating the sources in separate chambers partitioned by a partition wall, and providing a substrate conveyer, such as a rotating platform, to cyclically convey a substrate between the partitioned chambers so that the materials from the separated sources are serially introduced to the substrate per cycle in isolation of each other for layer-by-layer deposition and/or reaction on the substrate.
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