AQUEOUS COMPOSITION FOR ETCHING OF COPPER AND COPPER ALLOYS

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United States of America Patent

APP PUB NO 20140262805A1
SERIAL NO

14350856

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Abstract

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The present invention relates to an aqueous composition and a process for etching of copper and copper alloys. The aqueous composition comprises Fe3+ ions, an acid and a N-alkoxylated polyamide. The aqueous composition is particularly useful for making of fine structures in the manufacture of printed circuit boards, IC substrates and the like.

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Patent Owner(s)

Patent OwnerAddress
ATOTECH DEUTSCHLAND GMBHERASMUSSTRASSE 20 BERLIN 10553

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Exner, Anika Berlin, DE 1 1
Kloppisch, Mirko Berlin, DE 3 8
Lützow, Norbert Berlin, DE 5 6
Thoms, Martin Berlin, DE 5 12

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