COORDINATION OF BEAM ANGLE AND WORKPIECE MOVEMENT FOR TAPER CONTROL

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United States of America Patent

APP PUB NO 20140263212A1
SERIAL NO

14205200

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Abstract

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The angle of incidence (ω) and azimuth (φ) of a beam axis (32) can be moved relative to a workpiece (22) to provide desirable taper characteristics to a side wall (124) of a resulting kerf (120) produced by a focused laser beam (30) propagated along the beam axis (32).

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Patent Owner(s)

Patent OwnerAddress
ELECTRO SCIENTIFIC INDUSTRIES INC13900 NW SCIENCE PARK DRIVE PORTLAND OR 97229

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Zhang, Haibin Portland, US 72 992

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