Sealing structure, interference filter, optical module, and electronic apparatus
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United States of America Patent
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May 23, 2017
Grant Date -
Sep 18, 2014
app pub date -
Mar 17, 2014
filing date -
Mar 18, 2013
priority date (Note) -
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Abstract
An interference filter includes a first substrate on which a fixed reflection film is provided, a second substrate which faces the first substrate and on which a movable reflection film is provided, a first bonding film that bonds the first substrate and the second substrate to each other, and a sealer that is disposed between the first substrate and the second substrate in a first interspace that allows a first internal space sandwiched between the first substrate and the second substrate to communicate with a space outside the interference filter, the sealer sealing the first internal space, and an inter-substrate distance between the first substrate and the second substrate in the first interspace decreases in a direction from outer circumferential edges of the substrates toward an inner portion of the first interspace in a plan view viewed in a substrate thickness direction.
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