Dynamic peak tracking in X-ray photoelectron spectroscopy measurement tool

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United States of America Patent

PATENT NO 9080948
APP PUB NO 20140264015A1
SERIAL NO

13826316

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Abstract

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Systems and methods for performing X-ray Photoelectron Spectroscopy (XPS) measurements in a semiconductor environment are disclosed. A reference element peak is selected and tracked as part of the measurement process. Peak shift of the reference element peak, in electron volts (eV) is tracked and applied to other portions of acquired spectrum to compensate for the shift, which results from surface charge fluctuation.

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Patent Owner(s)

  • GLOBALFOUNDRIES INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Dai, Min Mahwah, US 51 756
Rangarajan, Srinivasan Fishkill, US 4 23
Sun, Bing Tarrytown, US 98 653

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