SPECIMEN INSPECTION APPARATUS
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United States of America Patent
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N/A
Issued Date -
Sep 18, 2014
app pub date -
Mar 11, 2014
filing date -
Mar 12, 2013
priority date (Note) -
Abandoned
status (Latency Note)
Importance
Abstract
A specimen inspection apparatus includes: a transportation unit which includes a transportation surface on which a specimen as an inspection object is loaded and is configured so as to transport the specimen; a terahertz wave generation unit which is positioned on the transportation surface side of the transportation unit and generates a terahertz wave; and a terahertz wave detection unit which is positioned on a side of a surface opposite the transportation surface of the transportation unit, and detects a terahertz wave which is emitted from the terahertz wave generation unit and transmits through the specimen loaded on the transportation surface, wherein the transportation unit includes a hole portion through which the transportation surface and the surface opposite the transportation surface communicate with each other, and is configured so that the specimen can be loaded on the hole portion.
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