Semiconductor chip with power gating through silicon vias

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 9040406
APP PUB NO 20140264332A1
SERIAL NO

13803895

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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A semiconductor chip includes a substrate having a frontside and a backside coupled to a ground. The chip includes a circuit in the substrate at the frontside. A through silicon via (TSV) having a front-end, a back-end, and a lateral surface is included. The back-end and lateral surface of the TSV are in the substrate, and the front-end of the TSV is substantially parallel to the frontside of the substrate. The chip also includes an antifuse material deposited between the back-end and lateral surface of the TSV and the substrate. The antifuse material insulates the TSV from the substrate. The chip includes a ground layer insulated from the substrate and coupled with the TSV and the circuit. The ground layer conducts a program voltage to the TSV to cause a portion of the antifuse material to migrate away from the TSV, thereby connecting the circuit to the ground.

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Patent Owner(s)

  • INTERNATIONAL BUSINESS MACHINES CORPORATION

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Erickson, Karl R Rochester, US 73 487
Paone, Phil C Rochester, US 79 502
Paulsen, David P Dodge Center, US 98 600
Sheets,, II John E Zumbrota, US 133 570
Uhlmann, Gregory J Rochester, US 76 469
Williams, Kelly L Rochester, US 50 315

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