PIEZOELECTRIC ELEMENT, LIQUID EJECTING HEAD, LIQUID EJECTING APPARATUS, ULTRASONIC TRANSDUCER, AND ULTRASONIC DEVICE
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United States of America Patent
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Issued Date -
Sep 18, 2014
app pub date -
Feb 5, 2014
filing date -
Mar 12, 2013
priority date (Note) -
Abandoned
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Abstract
Provided is a piezoelectric element which includes a first electrode, a piezoelectric body layer provided on the first electrode, a second electrode provided on the piezoelectric body layer, and a protection film constituted by a silicon oxide layer that is formed using trimethoxysilane and a liquid-phase zirconia layer, in which the protection film is formed to extend from upper portions of the first electrode and the second electrode to boundary portions between the electrodes and the piezoelectric body layers.
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