SHAPE MEASUREMENT APPARATUS, MEASUREMENT METHOD, AND METHOD OF MANUFACTURING ARTICLE
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United States of America Patent
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Issued Date -
Sep 18, 2014
app pub date -
Feb 26, 2014
filing date -
Mar 14, 2013
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
An apparatus measures a shape of an object by detecting interfering light between reference light and test light. The apparatus includes a detector configured to detect the interfering light, an optical member located between the object and the detector and including a light attenuating part, and an adjusting unit configured to adjust a relative position and/or angle between the optical member and an optical path of the test light. A part of the test light from a second region, having surface roughness smaller than that of a first region in the region including the measured region of the object is attenuated by the light attenuating part. The detector detects interfering light between the reference light and test light from the first region and the second region after passing through the optical member.
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