INTERFERENCE FILTER, OPTICAL FILTER DEVICE, OPTICAL MODULE, AND ELECTRONIC APPARATUS
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United States of America Patent
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app pub date -
Mar 17, 2014
filing date -
Mar 18, 2013
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Abandoned
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Abstract
A wavelength tunable interference filter includes a fixed substrate, a fixed reflection film that is provided on the fixed substrate, reflects part of incident light, and transmits at least part of the incident light, a movable reflection film that faces the fixed reflection film, reflects part of incident light, and transmits at least part of the incident light, and a fixed electrode that surrounds the fixed reflection film and has a light absorbing layer and a metal layer, and the light absorbing layer is disposed closer to the fixed substrate than the metal layer.
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