Cryopump and method for vacuum pumping non-condensable gas
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United States of America Patent
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Mar 28, 2017
Grant Date -
Sep 25, 2014
app pub date -
Mar 19, 2014
filing date -
Mar 19, 2013
priority date (Note) -
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status (Latency Note)
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Abstract
A cryopump includes: a radiation shield that includes a shield front end that defines a shield opening, a shield bottom portion, and a shield side portion that extends between the shield front end and the shield bottom portion; and a cryopanel assembly that is cooled to a lower temperature than that of the radiation shield. The cryopanel assembly includes a first panel arrangement including a plurality of first adsorption panels and a plurality of second panel arrangements each including a plurality of second adsorption panels. The first panel arrangement forms a multitude of adsorption sections arranged in a lattice-shaped pattern in cooperation with the plurality of second panel arrangements, each of the adsorption sections being exposed to the shield side portion.
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