Single-crystal silicon pulling silica container and method for producing the same

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United States of America Patent

PATENT NO 9376761
APP PUB NO 20140283737A1
SERIAL NO

14006169

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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The present invention is directed to a single-crystal silicon pulling silica container, the silica container including a straight body portion, a curved portion, and a bottom portion, wherein the OH group concentration in the straight body portion is 30 to 300 ppm by mass, the OH group concentration in the bottom portion is 30 ppm by mass or less, and the difference in the OH group concentration between the straight body portion and the bottom portion is 30 ppm by mass or more. As a result, a low-cost single-crystal silicon pulling silica container, the silica container that can reduce cavity defects called voids and pinholes in pulled single crystal silicon, is provided.

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First Claim

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Patent Owner(s)

  • SHIN-ETSU QUARTZ PRODUCTS CO., LTD.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Yamagata, Shigeru Narashino, JP 25 376

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