OPTICAL FILTER DEVICE, OPTICAL MODULE AND ELECTRONIC APPARATUS
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United States of America Patent
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Issued Date -
Sep 25, 2014
app pub date -
Mar 24, 2014
filing date -
Mar 25, 2013
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Abstract
An optical filter device includes a wavelength variable interference filter provided with a movable substrate on which respective electrode pads are provided; a base substrate on which the wavelength variable interference filter is mounted, facing the movable substrate; and a fixing member that is disposed between the movable substrate and the base substrate and fixes the movable substrate and the base substrate. The fixing member is disposed at a position that overlaps the respective electrode pads, in a filter plan view.
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