Asymmetric Spacers

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United States of America Patent

APP PUB NO 20140291761A1
SERIAL NO

13853090

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A semiconductor device having asymmetric spacers and steps for forming the same are disclosed. The spacers have difference capacitances, with the spacer having a higher capacitance formed over a source region of the device and the spacer having a lower capacitance formed over a drain region of the device. Embodiments of the disclosed invention include spacers made from different materials, having different or substantially equal thicknesses.

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Patent Owner(s)

Patent OwnerAddress
GLOBALFOUNDRIES INCMAPLE CORPORATE SERVICES LIMITED P O BOX 309 UGLAND HOUSE GRAND CAYMAN KY1-1104

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Cheng, Kangguo Schenectady, US 3073 29638
Khakifirooz, Ali Mountain View, US 842 11881
Wise, Richard S Newburgh, US 71 758

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