On-chip capacitors with a variable capacitance for a radiofrequency integrated circuit
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United States of America Patent
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Oct 27, 2015
Grant Date -
Oct 2, 2014
app pub date -
Jun 12, 2014
filing date -
Mar 18, 2009
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Abstract
Methods of fabricating an on-chip capacitor with a variable capacitance, as well as methods of adjusting the capacitance of an on-chip capacitor and design structures for an on-chip capacitor. The method includes forming first and second ports configured to be powered with opposite polarities, first and second electrodes, and first and second voltage-controlled units. The method includes configuring the first voltage-controlled unit to selectively couple the first electrode with the first port, and the second voltage-controlled unit to selectively couple the second electrode with the second port. When the first electrode is coupled by the first voltage-controlled unit with the first port and the second electrode is coupled by the second voltage-controlled unit with the second port, the capacitance of the on-chip capacitor increases.
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