Arrangement and method to sense flow using mechanical stress microsensors
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United States of America Patent
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May 7, 2019
Grant Date -
Oct 2, 2014
app pub date -
Jun 9, 2014
filing date -
Sep 13, 2005
priority date (Note) -
In Force
status (Latency Note)
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Abstract
An arrangement for controlling flow includes a flow control element, an actuator, a linkage assembly, and a sensor module. The linkage assembly is coupled between the flow control element and the actuator, and includes a rotatable linkage element coupled to impart force to the flow control element. The sensor module is affixed to the rotatable linkage element. The sensor module includes a MEMs-based strain gauge affixed to a substrate and operably coupled to measure torque on the linkage element, and a processing circuit disposed on the substrate. The processing circuit is operably coupled to receive torque measurement information representative of the measured torque. The processing circuit generates a fluid flow measurement value based on the torque measurement information and position information representative of a position of a flow control device of the flow control element. The flow control device is mechanically coupled to the rotatable linkage element.
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