MULTI-SEGMENT ELECTRODE ASSEMBLY AND METHODS THEREFOR
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United States of America Patent
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Oct 9, 2014
app pub date -
Apr 8, 2013
filing date -
Apr 8, 2013
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Abstract
A multi-segment electrode assembly having a plurality of electrode segments for modifying a plasma in a plasma processing chamber is disclosed. There is included a first powered electrode segment having a first plasma-facing surface, the first powered electrode segment configured to be powered by a first RE signal. There is also included a second powered electrode segment having a second plasma-facing surface, the second powered electrode segment configured to be powered by a second RE signal. The second powered electrode segment is electrically insulated from the first powered electrode segment, while at least one of the first plasma-facing surface and the second plasma-facing surface is non-planar.
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