Volume wave resonator using excitation/detection of vibrations

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United States of America Patent

PATENT NO 9246472
APP PUB NO 20140300246A1
SERIAL NO

14131341

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Abstract

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The invention relates to an acoustic volume wave resonator including a mounting, a resonating substrate, and a diaphragm. The mounting comprises an internal cavity and an internal electrode, so as to form a gap area between the internal electrode and a portion of the diaphragm. The resonating substrate is configured to generate longitudinal mode acoustic waves vibrating at the work frequency of the resonator, when an electrostatic field having a sinusoidal component at a work frequency is generated in the gap area by applying a differential voltage between the diaphragm or the first surface of the resonating substrate on the one hand and the internal electrode on the other hand.

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Patent Owner(s)

  • CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE;UNIVERSITE DE FRANCHE-COMTE

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ballandras, Sylvain Besancon, FR 46 118
Dulmet, Bernard Besancon, FR 1 0
Ivan, Mihaela Besancon, FR 1 0

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