DRAWING APPARATUS, AND METHOD OF MANUFACTURING ARTICLE
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United States of America Patent
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Issued Date -
Oct 9, 2014
app pub date -
Mar 19, 2014
filing date -
Apr 5, 2013
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
The present invention provides a drawing apparatus which performs drawing on a substrate with a charged particle beam, including a transmission unit including a plurality of channels and configured to transmit drawing data via the plurality of channels, a plurality of storages respectively corresponding to the plurality of channels, and configured to respectively store the drawing data transmitted via the plurality of channels, and a controller (21;14) configured to control at least either one of transmission start time and a transmission rate of the drawing data from the transmission unit with respect to each of the plurality of storages.
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