Soft pulsing
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United States of America Patent
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Dec 18, 2018
Grant Date -
Oct 16, 2014
app pub date -
Apr 23, 2014
filing date -
Feb 22, 2012
priority date (Note) -
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status (Latency Note)
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Abstract
Systems and methods for soft pulsing are described. One of the systems includes a master radiofrequency (RF) generator for generating a first portion of a master RF signal during a first state and a second portion of the master RF signal during a second state. The master RF signal is a sinusoidal signal. The system further includes an impedance matching circuit coupled to the master RF generator via an RF cable to modify the master RF signal to generate a modified RF signal and a plasma chamber coupled to the impedance matching circuit via an RF transmission line. The plasma chamber is used for generating plasma based on the modified RF signal. A statistical measure of the first portion has a positive or a negative slope.
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