Method and apparatus for controlled broadband microwave heating

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 10470256
APP PUB NO 20140305934A1
SERIAL NO

13986250

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Abstract

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A materials processing system comprises a thermal processing chamber and a broadband microwave power source. The power source includes an ovenized small-signal RF circuit, a high power microwave amplifier, and forward and reflected power detectors separated from one another by an isolator. The power detectors are also preferably ovenized. A control system provides control signals to the thermally stabilized VCO and VCA in the small-signal circuit to control output power based on detected forward power compared to demanded forward power. The system may be run in either open-loop or closed-loop modes.

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Patent Owner(s)

  • APPLIED MATERIALS, INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
DeCamillis, Clayton R Raleigh, US 14 91
Hampton, Michael L Raleigh, US 5 87
Hazelhurst, Richard C Holly Springs, US 7 28
Wander, Joseph M Chapel Hill, US 7 96

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