Seed Layer for Perpendicular Magnetic Anisotropy (PMA) Thin Film

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United States of America Patent

SERIAL NO

13863545

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A magnetic thin film deposition having PMA (perpendicular magnetic anisotropy) is a multilayered fabrication of materials having differing crystal symmetries that smoothly transition by use of a seed layer that promotes symmetry matching. An interface between layers in the deposition, such as an interface between a layer of MgO and an Fe-containing ferromagnetic layer, is a source of perpendicular magnetic anisotropy which then propagates throughout the remainder of the deposition by means of the symmetry matching seed layer.

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TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTDHSINCHU

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Moriyama, Takahiro Osaka, JP 13 600
Tong, Ru-Ying Los Gatos, US 180 4625
Wang, Yu-Jen San Jose, US 250 2707

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