Method of manufacturing water repellent film, nozzle plate, inkjet head, and inkjet recording device
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United States of America Patent
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Mar 31, 2015
Grant Date -
Oct 16, 2014
app pub date -
Feb 4, 2014
filing date -
Feb 4, 2013
priority date (Note) -
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Abstract
An object is to provide a method of manufacturing a water repellent film, a nozzle plate, an inkjet head, and an inkjet recording device which are able to improve dynamic water repellency of a water repellent film which includes a straight-chain fluorine-based organic material. The method of manufacturing a water repellent film includes forming a first organic film on a silicon substrate with a silicon compound which does not include a fluorine atom as a raw material, forming an inorganic oxide film on the first organic film, and forming a second organic film on the inorganic oxide film with a straight-chain fluorine-containing silane coupling agent as a raw material.
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