MEASURING APPARATUS AND ARTICLE MANUFACTURING METHOD
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United States of America Patent
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Issued Date -
Oct 16, 2014
app pub date -
Apr 10, 2014
filing date -
Apr 11, 2013
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
Provided is a measuring apparatus that includes a heterodyne interferometer; a first detector configured to detect interference light between reference light and light to be detected, and output a measured signal; a second detector configured to detect interference light between the first and the second light, and output a reference signal; an oscillator configured to generate a standard signal having a frequency corresponding to a frequency shift amount; a first synchronization detector configured to perform synchronous detection of the measured signal and the standard signal; a second synchronization detector configured to perform synchronous detection of the reference signal and the standard signal; a first processing unit that determines a phase difference between the measured signal and the reference signal based on the outputs of the first synchronization detector and the second synchronization detector; and a second processing unit that determines the position of the object based on the phase difference.
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