APPARATUS AND METHOD FOR CONTROLLED DEPOSITION OF AEROSOLIZED PARTICLES ONTO A SUBSTRATE

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United States of America Patent

APP PUB NO 20140308456A1
SERIAL NO

14247197

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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An apparatus for the controlled deposition of particles onto a film or a substrate, including: a frame arranged to support a film or a substrate having first and second surfaces facing in first and second opposite directions, respectively; a nozzle arranged to emit a stream of particles charged with a first polarity toward the first surface; and an electrode: charged with a second polarity, opposite the first polarity, and located adjacent the second surface; and arranged to attract the stream of particles to a region of the first surface. A line orthogonal to the first surface passes through the region and the electrode.

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Patent Owner(s)

Patent OwnerAddress
KLA-TENCOR CORPORATIONONE TECHNOLOGY DRIVE MILPITAS CA 95035

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Guan, Yu Pleasanton, US 11 68
Kole, Francisco San Jose, US 2 0

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