Method for forming micro-electro-mechanical system (MEMS) beam structure

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 9969613
SERIAL NO

13861620

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

Micro-Electro-Mechanical System (MEMS) structures, methods of manufacture and design structures are disclosed. The method includes forming a Micro-Electro-Mechanical System (MEMS) beam structure by venting both tungsten material and silicon material above and below the MEMS beam to form an upper cavity above the MEMS beam and a lower cavity structure below the MEMS beam.

Loading the Abstract Image... loading....

First Claim

See full text

Family

Loading Family data... loading....

Patent Owner(s)

  • IBM CORPORATION

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Brigham, Michael T Bolton, US 11 31
Jahnes, Christopher V Upper Saddle River, US 87 1864
Luce, Cameron E Essex Junction, US 15 59
Maling, Jeffrey C Grand Isle, US 43 520
Murphy, William J North Ferrisburgh, US 170 2431
Stamper, Anthony K Williston, US 613 6570
White, Eric J Charlotte, US 53 616

Cited Art Landscape

Load Citation

Patent Citation Ranking

Forward Cite Landscape

Load Citation

Maintenance Fees

Fee Large entity fee small entity fee micro entity fee due date
7.5 Year Payment $3600.00 $1800.00 $900.00 Nov 15, 2025
11.5 Year Payment $7400.00 $3700.00 $1850.00 Nov 15, 2029
Fee Large entity fee small entity fee micro entity fee
Surcharge - 7.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge - 11.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge after expiration - Late payment is unavoidable $700.00 $350.00 $175.00
Surcharge after expiration - Late payment is unintentional $1,640.00 $820.00 $410.00