Imprint apparatus and article manufacturing method

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 9770850
APP PUB NO 20140312532A1
SERIAL NO

14254364

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

Provided is an imprint apparatus that imprints a pattern formed on a mold onto a substrate. The imprint apparatus includes a substrate holder that holds the substrate and can move in a direction along the surface of the substrate; a gas supply unit for supplying a gas into a space between a pattern part of the mold and the substrate; and a wall part that is disposed so as to enclose the space that is supplied with gas, wherein at a position opposed to the substrate and the mold, the wall part faces the substrate holder or the substrate with a gap therebetween.

Loading the Abstract Image... loading....

First Claim

See full text

Family

Loading Family data... loading....

Patent Owner(s)

  • CANON KABUSHIKI KAISHA;MOLECULAR IMPRINTS, INC.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Arai, Tsuyoshi Utsunomiya, JP 113 700
Choi, Byung-Jin Austin, US 182 2069
Mizuno, Makoto Utsunomiya, JP 61 978
Shackleton, Steven C Austin, US 28 123
Takabayashi, Yukio Saitama, JP 31 631

Cited Art Landscape

Load Citation

Patent Citation Ranking

Forward Cite Landscape

Load Citation

Maintenance Fees

Fee Large entity fee small entity fee micro entity fee due date
7.5 Year Payment $3600.00 $1800.00 $900.00 Mar 26, 2025
11.5 Year Payment $7400.00 $3700.00 $1850.00 Mar 26, 2029
Fee Large entity fee small entity fee micro entity fee
Surcharge - 7.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge - 11.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge after expiration - Late payment is unavoidable $700.00 $350.00 $175.00
Surcharge after expiration - Late payment is unintentional $1,640.00 $820.00 $410.00