Sputter target and sputtering methods

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United States of America Patent

PATENT NO 9831072
SERIAL NO

14129911

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Abstract

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The present disclosure concerns sputter targets and sputtering methods. In particular, sputter targets and methods of sputtering using conventional sputter targets as well as sputter targets described herein, for highly uniform sputter deposition, are described.

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Patent Owner(s)

  • VIEW, INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Parker, Ronald M Olive Branch, US 64 1968
Rozbicki, Robert T Germantown, US 176 5412

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