Inspection apparatus

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United States of America Patent

PATENT NO 8946629
SERIAL NO

14258607

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Abstract

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An inspection apparatus includes: beam generation means for generating any of charged particles and electromagnetic waves as a beam; a primary optical system that guides the beam into an inspection object held in a working chamber and irradiates the inspection object with the beam; a secondary optical system that detects secondary charged particles occurring from the inspection object; and an image processing system that forms an image on the basis of the detected secondary charged particles. The primary optical system includes a photoelectron generator having a photoelectronic surface. The base material of the photoelectronic surface is made of material having a higher thermal conductivity than the thermal conductivity of quartz.

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Patent Owner(s)

  • EBARA CORPORATION

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hatakeyama, Masahiro Tokyo, JP 111 2104
Toma, Yasushi Tokyo, JP 39 381
Tsukamoto, Kiwamu Tokyo, JP 26 1599
Yoshikawa, Shoji Tokyo, JP 89 2332

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