APPARATUS AND METHOD FOR PLASMA TREATMENT OF SURFACES
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Jul 16, 2014
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Jan 17, 2012
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Abstract
A method and a device for the plasma treatment of surfaces of at least one workpiece. At least one plasma source is connected to an energy source in order to generate a plasma. A closed area is in fluid connection to the at least one plasma source. At least one suction unit is used to adjust a pressure difference between the at least one plasma source and the closed area.
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