Reticle chuck cleaner and reticle chuck cleaning method

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United States of America Patent

PATENT NO 9808841
SERIAL NO

14342718

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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There is provided a reticle chuck cleaner A for cleaning a reticle chuck of an apparatus, as a reticle chuck cleaner that allows easy cleaning of a reticle chuck in a vacuum chamber of an apparatus without exposing the chamber to the atmosphere and contributes to improvement of the operating ratio of the apparatus, including: an adhesive layer 1 to be adhered to a chuck region of the reticle chuck; a support layer 2 laminated on the adhesive layer 1; and a substrate 3 having a shape capable of being carried to the reticle chuck, the support layer 2 and the substrate 3 being partially bonded together in an adhesive region 41 of a partial adhesive layer 4.

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Patent Owner(s)

  • TOSHIBA MEMORY CORPORATION

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Inada, Taro Shibukawa, JP 6 28
Itoh, Masamitsu Tokyo, JP 78 1081
Kobayashi, Yoshihito Tokyo, JP 45 699
Watanabe, Jun Tokyo, JP 376 3157

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