METHOD OF MEASURING NARROW RECESSED FEATURES USING MACHINE VISION
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United States of America Patent
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Issued Date -
Nov 20, 2014
app pub date -
May 14, 2014
filing date -
May 17, 2013
priority date (Note) -
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Abstract
Deep narrow gaps (20) between side walls (32 and 36) of a workpiece (26) can be measure by modules (42) that include an imager (70) and provide focused directional lighting from light sources (76) into the gaps (20). The imager (70) may employ a camera having an array of pixels along rows and columns. Gray scale captured by pixels along rows or columns parallel to a major axis (46) of the gap (20) may be analyzed to facilitate determination of spacing between the edges (34 and 38) of the gaps (20). Relative movement between the workpiece (26) and the imager (76) along the major axis (46) can also facilitate determination of spacing between the edges (34 and 38) of the gaps (20).
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