METHOD FOR PRODUCING AN OPTOELECTRONIC SEMICONDUCTOR CHIP AND CORRESPONDING OPTOELECTRONIC SEMICONDUCTOR CHIP
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United States of America Patent
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Issued Date -
Nov 20, 2014
app pub date -
Aug 28, 2012
filing date -
Sep 30, 2011
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Abandoned
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Abstract
A method of producing a semiconductor chip includes providing a silicon growth substrate, producing a III nitride buffer layer on the growth substrate by sputtering, and growing a III nitride semiconductor layer sequence having an active layer above the buffer layer.
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